TY - JOUR AU - Gheorghe Stan AU - Richard Gates AU - Premsagar Kavuri AU - Jessica Torres AU - David Michalak AU - Canay Ege AU - Jeff Bielefeld AU - Sean King C2 - Applied Physics Letters DA - 2014-10-15 LA - en PB - Applied Physics Letters PY - 2014 TI - Mechanical property changes in porous low-k dielectric thin films during processing UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=916271 ER -