TY - JOUR AU - Jungjoon Ahn AU - Santiago Solares AU - Lin You AU - Hanaul Noh AU - Joseph Kopanski AU - Yaw Obeng C2 - Journal of Applied Physics DA - 2019-02-20 00:02:00 DO - https://doi.org/10.1063/1.5065385 LA - en M1 - 125 PB - Journal of Applied Physics PY - 2019 TI - Probe assisted localized doping of aluminum into silicon substrates UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=925130 ER -