TY - JOUR AU - Safak Sayan AU - Mark Croft AU - Nhan Nguyen AU - Tom Emge AU - Evgeni Gusev AU - Hyunjung Kim AU - James Ehrstein AU - Paul McIntyre AU - Eric Garfunkel C2 - Applied Physics Letters DA - 2005-09-01 00:09:00 LA - en M1 - 15 PB - Applied Physics Letters PY - 2005 TI - Amorphous to Tetragonal Transition in Ultrathin Zirconia Films: Effect on the Electronic and Dielectric Properties ER -