TY - JOUR AU - Joseph Kopanski AU - Jay Marchiando AU - Brian Rennex C2 - Journal of Vacuum Science and Technology DA - 2000-01-01 00:01:00 LA - en M1 - B 18 PB - Journal of Vacuum Science and Technology PY - 2000 TI - Carrier Concentration Dependence of Scanning Capacitance Microscopy Signal in the Vicinity of P-N Junctions ER -