TY  - JOUR
AU  - Kopanski, Joseph
AU  - Marchiando, Jay
AU  - Rennex, Brian
C2  - Journal of Vacuum Science and Technology
DA  - 2000-01-01 00:01:00
LA  - en
M1  - B 18
PB  - Journal of Vacuum Science and Technology
PY  - 2000
TI  - Carrier Concentration Dependence of Scanning Capacitance Microscopy Signal in the Vicinity of P-N Junctions
ER  -