TY  - JOUR
AU  - Michael Cresswell
AU  - Richard Allen
AU  - William Guthrie
AU  - Christine Murabito
AU  - Ronald Dixson
AU  - Amy Hunt
C2  - IEEE Transactions on Instrumentation and Measurement
DA  - 2008-01-01 00:01:00
LA  - en
M1  - 57
PB  - IEEE Transactions on Instrumentation and Measurement
PY  - 2008
TI  - Comparison of SEM and HRTEM CD Measurements Extracted from Test-Structures Having Feature Linewidths from 40 nm to 240 nm
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=32240
ER  -