TY  - CONF
AU  - Joseph Kopanski
AU  - Jay Marchiando
AU  - Brian Rennex
C2  - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors,  Research Triangle Park, NC, USA
DA  - 1999-06-01 00:06:00
LA  - en
PB  - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors,  Research Triangle Park, NC, USA
PY  - 1999
TI  - Carrier Concentration Dependence of Scanning Capacitance Microscopy Signal in the Vicinity of P-N Junctions
ER  -