TY  - CONF
AU  - Suehle, John
AU  - Vogel, Eric
AU  - Wang, Bin
AU  - Bernstein, J
C2  - Proc. 2000 International Reliability Physics Symposium, San Jose, CA, USA
DA  - 2000-12-31 00:12:00
LA  - en
PB  - Proc. 2000 International Reliability Physics Symposium, San Jose, CA, USA
PY  - 2000
TI  - Temperature Dependence of Soft Breakdown and Wear-Out in Sub-3 nm SiO<sub>2</sub> Films
ER  -