TY  - JOUR
AU  - Michael Cresswell
AU  - Richard Allen
AU  - William Guthrie
AU  - Rathindra Ghoshtagore
AU  - Loren Linholm
AU  - J. Sniegowski
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 1998-05-01 00:05:00
LA  - en
M1  - 11
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 1998
TI  - Electrical Linewidth Test Structures Fabricated in Mono-Crystalline Films for Reference-Material Applications
ER  -