TY - CONF AU - Kopanski, Joseph AU - Marchiando, Jay AU - Berning, David C2 - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA DA - 1997-12-31 00:12:00 LA - en PB - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA PY - 1997 TI - Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions ER -