TY  - CONF
AU  - Joseph Kopanski
AU  - Jay Marchiando
AU  - David Berning
C2  - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA
DA  - 1997-12-31 00:12:00
LA  - en
PB  - Proc., International Workshop on the Measurement and Characterization of Ultrashallow Doping Profiles in Semiconductors, Research Triangle Park, NC, USA
PY  - 1997
TI  - Scanning Capacitance Microscopy Measurement of 2-D Dopant Profiles across Junctions
ER  -