TY - JOUR AU - Nhan Nguyen AU - Joseph Pellegrino AU - Paul Amirtharaj AU - David Seiler AU - S. Qadri C2 - Journal of Applied Physics DA - 1993-06-01 00:06:00 LA - en M1 - 73 PB - Journal of Applied Physics PY - 1993 TI - Interface Roughness of Short-Period AlAs/GaAs Superlattices Studied by Spectroscopic Ellipsometry ER -