TY  - JOUR
AU  - D Kremer
AU  - R Davis
AU  - Elizabeth Moore
AU  - S Ehrman
C2  - Journal of Crystal Growth
DA  - 2003-01-01 00:01:00
LA  - en
M1  - 247
PB  - Journal of Crystal Growth
PY  - 2003
TI  - A Numerical Investigation of the Effects of Gas-Phase Particle Formation on Silicon Film Deposition from Silane
ER  -