TY  - JOUR
AU  - J Scott
AU  - E Landree
AU  - Terrence Jach
AU  - Eric Windsor
C2  - Microscopy and Microanalysis
DA  - 2000-08-01 00:08:00
LA  - en
M1  - 6
PB  - Microscopy and Microanalysis
PY  - 2000
TI  - Silicon Oxynitride Film Thickness Measurements Using HRTEM and Grazing Incidence X-Ray Photoelectron Spectroscopy (GIXPS)
ER  -