TY  - JOUR
AU  - D Kremer
AU  - R Davis
AU  - Elizabeth Moore
AU  - James Maslar
AU  - Donald Burgess Jr.
AU  - S Ehrman
C2  - Journal of the Electrochemical Society
DA  - 2003-02-01 00:02:00
LA  - en
M1  - 150
PB  - Journal of the Electrochemical Society
PY  - 2003
TI  - An Investigation of Particle Dynamics in a Rotating Disk Chemical Vapor Deposition Reactor
ER  -