TY - JOUR
AU - T Gougousi
AU - Y Xu
AU - J Kidder
AU - G Rubloff
AU - Charles Tilford
C2 - Journal of Vacuum Science and Technology B
DA - 2000-05-01 00:05:00
LA - en
M1 - 18
PB - Journal of Vacuum Science and Technology B
PY - 2000
TI - Process Diagnostics and Thickness Metrology Using in Situ Mass Spectrometry for the Chemical Vapor Deposition of W from H2/WF6
ER -