TY  - JOUR
AU  - J Scott
AU  - Eric Windsor
C2  - Journal of the Materials Research Society
DA  - 2000-01-01 00:01:00
LA  - en
M1  - 592
PB  - Journal of the Materials Research Society
PY  - 2000
TI  - Chemical and Structural Characterization of Ultrathin Dielectric Films Using AEM
ER  -