TY  - JOUR
AU  - Alain Diebold
AU  - J Canterbury
AU  - W Chism
AU  - Curt Richter
AU  - Nhan Nguyen
AU  - James Ehrstein
AU  - C Weintraub
C2  - Materials Science in Semiconductor Processing
DA  - 2001-02-06 00:02:00
LA  - en
M1  - 4
PB  - Materials Science in Semiconductor Processing
PY  - 2001
TI  - Characterization and Production Metrology of Gate Dielectric Films: Optical Models for Oxynitrides and High Dielectric Constant Films
ER  -