TY  - JOUR
AU  - Joseph Kopanski
AU  - Jay Marchiando
AU  - Brian Rennex
AU  - David Simons
AU  - R Chaudhury
C2  - Journal of Vacuum Science and Technology B
DA  - 2004-02-01 00:02:00
LA  - en
M1  - 22
PB  - Journal of Vacuum Science and Technology B
PY  - 2004
TI  - Towards reproducible SCM Image Interpretation
ER  -