TY  - CONF
AU  - Nhan Nguyen
AU  - James Maslar
AU  - Junghyeun Kim
AU  - Jin-Ping Han
AU  - Jin-Won Park
AU  - Deane Chandler-Horowitz
AU  - Eric Vogel
C2  - High  -Mobility Group -IV Materials and Devices, MRS Proceedings, San Francisco, CA, USA
DA  - 2005-05-09 00:05:00
LA  - en
PB  - High  -Mobility Group -IV Materials and Devices, MRS Proceedings, San Francisco, CA, USA
PY  - 2005
TI  - Characterization of Structural Quality of Bonded Silicon-On-Insulator Wafers by Spectroscopic Ellipsometry and Raman Spectroscopy
ER  -