TY - CONF AU - Allen Hefner Jr. AU - David Berning AU - Colleen Hood C2 - GOMAC Digest of Technical Papers, Las Vegas, NV, USA DA - 2005-04-04 00:04:00 LA - en PB - GOMAC Digest of Technical Papers, Las Vegas, NV, USA PY - 2005 TI - Metrology for High-Voltage, High-Speed Silicon-Carbide Power Devices UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=31918 ER -