TY  - CONF
AU  - Nadine Guillaume
AU  - Michael Cresswell
AU  - Richard Allen
AU  - Sarah Everist
AU  - Loren Linholm
C2  - Proc., IEEE International Conference on Microelectronic Test Structures, Goteborg, 1, SW
DA  - 1999-05-01 00:05:00
LA  - en
PB  - Proc., IEEE International Conference on Microelectronic Test Structures, Goteborg, 1, SW
PY  - 1999
TI  - Comparison of Sheet-Resistance Measurements Obtained By Standard and Small-Area Four-Point Probing
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=5777
ER  -