TY  - JOUR
AU  - C. Driemeier
AU  - K Bastos
AU  - L Miotti
AU  - I.J.R. Baumvol
AU  - Nhan Nguyen
AU  - Safak Sayan
AU  - C Krug
C2  - Applied Physics Letters
DA  - 2005-11-17 00:11:00
LA  - en
M1  - 86
PB  - Applied Physics Letters
PY  - 2005
TI  - Compositional Stability of Hafnium Aluminates Thin Films Deposited on Si by Atomic Layer Deposition
ER  -