TY - CONF AU - J.T. Ryan AU - Patrick Lenahan AU - A.T. Krishnan AU - S. Krishnan AU - Jason Campbell C2 - 2009 IEEE International Reliability Physics Symposium, Montreal, CA DA - 2009-04-26 00:04:00 LA - en PB - 2009 IEEE International Reliability Physics Symposium, Montreal, CA PY - 2009 TI - Spin Dependent Recombination Study of the Atomic-Scale Effects of Fluorine on the Negative Bias Temperature Instability UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=902305 ER -