TY  - JOUR
AU  - Stewart Smith
AU  - Andreas Tsiamis
AU  - Martin McCallum
AU  - Andrew Hourd
AU  - J Stevenson
AU  - Anthony Walton
AU  - Ronald Dixson
AU  - Richard Allen
AU  - James Potzick
AU  - Michael Cresswell
AU  - Ndubuisi Orji
C2  - IEEE Transactions on Semiconductor Manufacturing
DA  - 2009-02-19 00:02:00
LA  - en
M1  - 22
PB  - IEEE Transactions on Semiconductor Manufacturing
PY  - 2009
TI  - Comparison of Measurement Techniques for Linewidth Metrology on Advanced Photomasks
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=901862
ER  -