TY  - JOUR
AU  - F Chien
AU  - W Hsieh
AU  - S Gwo
AU  - Jay Jun
AU  - Richard Silver
AU  - Andras Vladar
AU  - John Dagata
C2  - Journal of Applied Physics
DA  - 2005-01-01 00:01:00
LA  - en
M1  - 23
PB  - Journal of Applied Physics
PY  - 2005
TI  - Characterization of Prototype Silicon Pitch Artifacts Fabricated by Scanning Probe Lithography and Anisotropic Wet Etching
ER  -