TY  - CONF
AU  - Jason Gorman
AU  - Nicholas Dagalakis
C2  - Proceedings of IMECE''03, Washington, MD, USA
DA  - 2003-11-21 00:11:00
LA  - en
PB  - Proceedings of IMECE''03, Washington, MD, USA
PY  - 2003
TI  - Force Control of Linear Motor Stages for Microassembly
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=822478
ER  -