TY  - CONF
AU  - T Mcwaid
AU  - J Schneir
C2  - Proceedings of ASPE, Cincinnati, OH, US
DA  - 1994-01-01 00:01:00
LA  - en
PB  - Proceedings of ASPE, Cincinnati, OH, US
PY  - 1994
TI  - The Design of an Atomic Force Microscope for Metrology
ER  -