TY  - JOUR
AU  - J Yen
AU  - K Lan
AU  - John Kramar
C2  - Sensors And Actuators
DA  - 2005-05-31 00:05:00
LA  - en
M1  - 121
PB  - Sensors And Actuators
PY  - 2005
TI  - Active Vibration Isolation of a Large Stroke Scanning Probe Microscope by Using Discrete Sliding Mode Control
ER  -