TY - CONF AU - Jack Stone Jr. AU - Alois Stejskal AU - Lowell Howard C2 - Proceedings of American Society for Precision Engineering, Monterey, CA, USA DA - 1996-01-01 00:01:00 LA - en PB - Proceedings of American Society for Precision Engineering, Monterey, CA, USA PY - 1996 TI - Wavelength-Shift Interferometry: Using a Dither to Improve Accuracy ER -