TY  - CONF
AU  - R Katz
AU  - C Chase
AU  - R Kris
AU  - R Peltinov
AU  - John Villarrubia
AU  - B Bunday
C2  - Proceedings of SPIE, San Jose, CA, USA
DA  - 2006-03-24 00:03:00
LA  - en
M1  - 6152
PB  - Proceedings of SPIE, San Jose, CA, USA
PY  - 2006
TI  - Bias Reduction in Roughness Measurement through SEM Noise Removal
ER  -