TY  - CONF
AU  - Xuezeng Zhao
AU  - Joseph Fu
AU  - Wei Chu
AU  - C Nguyen
AU  - Theodore Vorburger
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Editor, Santa Clara, CA, USA
DA  - 2004-05-01 00:05:00
LA  - en
M1  - 5375
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVIII, Richard M. Silver, Editor, Santa Clara, CA, USA
PY  - 2004
TI  - An Image Stitching Method to Eliminate the Distortion of the Sidewall in Linewidth Measurement
ER  -