TY  - CONF
AU  - T Mcwaid
AU  - J Schneir
AU  - Theodore Vorburger
C2  - Proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, Aachen, DE
DA  - 1994-01-01 00:01:00
LA  - en
PB  - Proceedings of the 3rd International Conference on Ultraprecision in Manufacturing Engineering, Aachen, DE
PY  - 1994
TI  - A Calibrated Atomic Force Microscope
ER  -