TY - CONF AU - E Amatucci AU - Nicholas Dagalakis AU - John Kramar AU - Fredric Scire C2 - Proceedings of American Society for Precision Engineering, Scottsdale, AZ, USA DA - 2000-01-01 00:01:00 LA - en M1 - 22 PB - Proceedings of American Society for Precision Engineering, Scottsdale, AZ, USA PY - 2000 TI - Performance Evaluation of a Parallel Cantilever Biaxial Micropositioning Stage ER -