TY  - JOUR
AU  - James Clarke
AU  - Martin Schmidt
AU  - Ndubuisi Orji
C2  - Journal of Vacuum Science and Technology B
DA  - 2007-11-01 00:11:00
LA  - en
M1  - 25
PB  - Journal of Vacuum Science and Technology B
PY  - 2007
TI  - Photoresist Cross-sectioning with Negligible Damage using a Dual-beam FIB-SEM: A High Throughput Method for Profile Imaging
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823232
ER  -