TY  - CONF
AU  - Jing Li
AU  - Yin-Lin Shen
AU  - Jaehwa Jeong
AU  - Fredric Scire
AU  - John Kramar
C2  - American Society for Precision Engineering, Annual Meeting | 23rd | Proceedings of ASPE 23rd Annual Meeting | American Society for Precision Engineering, Portland, OR, US
DA  - 2008-10-19 00:10:00
LA  - en
PB  - American Society for Precision Engineering, Annual Meeting | 23rd | Proceedings of ASPE 23rd Annual Meeting | American Society for Precision Engineering, Portland, OR, US
PY  - 2008
TI  - A COMPACT, COMPOUND ACTUATOR FOR THE MOLECULAR MEASURING MACHINE
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=824698
ER  -