TY  - CONF
AU  - Bala Muralikrishnan
AU  - Jack Stone Jr.
AU  - John Stoup
C2  - Proceedings of MicroManufacturing Conference and Exhibits 2006 - Society of Manufacturing Engineers, Los Angeles, CA, USA
DA  - 2005-05-01 00:05:00
LA  - en
PB  - Proceedings of MicroManufacturing Conference and Exhibits 2006 - Society of Manufacturing Engineers, Los Angeles, CA, USA
PY  - 2005
TI  - Micro-Feature Metrology
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=823208
ER  -