TY  - JOUR
AU  - Charles Bouldin
AU  - William Wallace
AU  - G Lynn
AU  - S Roth
AU  - Wen-Li Wu
C2  - Journal of Applied Physics
DA  - 2000-07-01 00:07:00
LA  - en
M1  - 88
PB  - Journal of Applied Physics
PY  - 2000
TI  - Thermal Expansion Coefficients of Low-K Dielectric Films From Fourier Analysis of X-Ray Reflectivity
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=850326
ER  -