TY - CONF AU - R Koning AU - Ronald Dixson AU - Joseph Fu AU - G Peng AU - Theodore Vorburger C2 - Proceedings of 4th Seminar on Quantitative Microscopy, K. Hasche, et al., Editors, PTB Report PTB-F-39, , 1, AU DA - 2000-01-01 00:01:00 LA - en PB - Proceedings of 4th Seminar on Quantitative Microscopy, K. Hasche, et al., Editors, PTB Report PTB-F-39, , 1, AU PY - 2000 TI - Interferometric Calibration of a Capacitance Displacement Sensor Over Short Displacement Ranges ER -