TY  - CONF
AU  - D Casa
AU  - R Jones
AU  - Theodore Vorburger
AU  - Ndubuisi Orji
AU  - G Barclay
AU  - P Bolton
AU  - W Wu
AU  - E Lin
AU  - T Hu
C2  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA, USA
DA  - 2003-05-01 00:05:00
LA  - en
M1  - 5038
PB  - Proceedings of SPIE, Metrology, Inspection, and Process Control for Microlithography XVII, Daniel J. Herr, Editor, Santa Clara, CA, USA
PY  - 2003
TI  - Subnanometer Wavelength Metrology of Lithographically Prepared structures: A Comparison of Neutron and X-Ray Scattering
ER  -