TY  - GEN
AU  - Clare Allocca
AU  - Stephen Freiman
C2  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
DA  - 2003-12-15 00:12:00
LA  - en
PB  - NIST Interagency/Internal Report (NISTIR), National Institute of Standards and Technology, Gaithersburg, MD
PY  - 2003
TI  - Nanometrology - FY 2003 Program and Selected Accomplishments
ER  -