TY - JOUR AU - C King AU - H Pois AU - S Zangooie AU - R Young AU - Joseph Woicik AU - J Gupta C2 - Applied Physics Letters DA - 2021-10-12 15:10:19 LA - en PB - Applied Physics Letters PY - 2021 TI - Advanced Optical Techniques for the Determination of Composition and Thickness of Strained SiGe Alloys for a Manufacturing Environment ER -