TY - JOUR
AU - U Beck
AU - Douglas Smith
AU - G Reiners
AU - S Dapkunas
C2 - Thin Solid Films
DA - 1998-09-24 00:09:00
LA - en
M1 - 332
PB - Thin Solid Films
PY - 1998
TI - Mechanical Properties of Si02 and Si3N4 Coatings: A BAM/NIST Cooperative Project
ER -