TY  - JOUR
AU  - Lysaght, Patrick
AU  - Woicik, Joseph
AU  - Fischer, Daniel
AU  - Bersuker, Gennadi
AU  - Barnett, Joel
AU  - Foran, Brendan
AU  - Tseng, Hsing-Huang
AU  - Jammy, Raj
C2  - Journal of Applied Physics
DA  - 2021-10-12 15:10:19
LA  - en
PB  - Journal of Applied Physics
PY  - 2021
TI  - Chemical Analysis of HfO<sub>2</sub>/ Si (100) Film Systems Exposed to NH<sub>3</sub> Thermal Processing
ER  -