TY  - JOUR
AU  - Patrick Lysaght
AU  - Joseph Woicik
AU  - Daniel Fischer
AU  - Gennadi Bersuker
AU  - Joel Barnett
AU  - Brendan Foran
AU  - Hsing-Huang Tseng
AU  - Raj Jammy
C2  - Journal of Applied Physics
DA  - 2021-10-12 15:10:19
LA  - en
PB  - Journal of Applied Physics
PY  - 2021
TI  - Chemical Analysis of HfO<sub>2</sub>/ Si (100) Film Systems Exposed to NH<sub>3</sub> Thermal Processing
ER  -