TY  - CONF
AU  - John Villarrubia
AU  - Andras Vladar
AU  - Michael Postek
C2  - Proc. SPIE Scanning Microscopies, Monterey, CA
DA  - 2014-10-23
DO  - https://doi.org/10.1117/12.2069324
LA  - en
M1  - 9236
PB  - Proc. SPIE Scanning Microscopies, Monterey, CA
PY  - 2014
TI  - 3D Monte Carlo modeling of the SEM: Are there applications to photomask metrology?
ER  -