TY  - JOUR
AU  - D Goldfarb
AU  - M Angelopoulos
AU  - Eric Lin
AU  - Ronald Jones
AU  - Christopher Soles
AU  - Joseph~undefined~undefined~undefined~undefined~undefined Lenhart
AU  - Wen-Li Wu
C2  - Journal of Vacuum Science and Technology B
DA  - 2001-12-01 00:12:00
LA  - en
M1  - 19
PB  - Journal of Vacuum Science and Technology B
PY  - 2001
TI  - Confinement Effects on the Spatial Extent of the Reaction Front in Ultrathin Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=851937
ER  -