TY  - JOUR
AU  - U Paik
AU  - J Kim
AU  - Y Yung
AU  - T Katoh
AU  - Jinkyoo Park
AU  - Vincent Hackley
C2  - Journal of the Korean Physical Society
DA  - 2001-12-01 00:12:00
LA  - en
M1  - 39
PB  - Journal of the Korean Physical Society
PY  - 2001
TI  - The Effect of Si Dissolution on the Stability of Silica Particles and its Influence on Chemical Mechanical Polishing for Interlayer Dielectrics
ER  -