TY  - CONF
AU  - B Vogt
AU  - Shuhui Kang
AU  - Vivek Prabhu
AU  - Ashwin Rao
AU  - Eric Lin
AU  - Sushil Satija
AU  - Karen Turnquest
AU  - Wen-Li Wu
C2  - Proceedings of SPIE, San Jose, CA, US
DA  - 2006-03-01 00:03:00
LA  - en
M1  - 483
PB  - Proceedings of SPIE, San Jose, CA, US
PY  - 2006
TI  - The Deprotection Reaction Front Profile for Model 193 nm Methacrylate-Based Chemically Amplified Photoresists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852589
ER  -