TY  - CONF
AU  - Patrick Lysaght
AU  - Joseph Woicik
AU  - Brendan Foran
AU  - Joel Barnett
AU  - Gennadi Bersuker
AU  - B Lee
C2  - ECS Conference | 208th | 2006 |, Undefined
DA  - 2006-11-17 00:11:00
LA  - en
PB  - ECS Conference | 208th | 2006 |, Undefined
PY  - 2006
TI  - The Influence of NH<sub>3</sub> Anneal on the Crystallization Kinetics of HfO<sub>2</sub> Gate Dielectric Films
ER  -