TY  - JOUR
AU  - Ronald Jones
AU  - C Willson
AU  - T Hu
AU  - Eric Lin
AU  - Wen-Li Wu
AU  - D Goldfarb
AU  - M Angelopoulos
AU  - B Trinque
AU  - G Schmidt
AU  - M Stewart
C2  - Journal of Polymer Science Part B-Polymer Physics
DA  - 2004-09-01 00:09:00
LA  - en
M1  - 42
PB  - Journal of Polymer Science Part B-Polymer Physics
PY  - 2004
TI  - Formation of Deprotected Fuzzy Blobs in Chemically Amplified Resists
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852245
ER  -