TY  - ICOMM
AU  - Barry Bauer
AU  - V. Lee
AU  - R Hedden
AU  - Christopher Soles
AU  - D Liu
AU  - Wen-Li Wu
C1  - http://www.sns.gov/acns/
C2  - Electronic Publication
DA  - 2002-07-01 00:07:00
LA  - en
M1  - 35(13)
PB  - Electronic Publication
PY  - 2002
TI  - SANS Characterization of Nanoporous Thin Films for the Next Generation of Integrated Circuits
UR  - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=852061
ER  -