TY - JOUR AU - Daniel Josell AU - Daniel Wheeler AU - W Huber AU - Thomas Moffat C2 - Physical Review Letters DA - 2001-07-01 00:07:00 LA - en M1 - 87 PB - Physical Review Letters PY - 2001 TI - Superconformal Electrodeposition in Submicron Features UR - https://tsapps.nist.gov/publication/get_pdf.cfm?pub_id=853028 ER -